A thesis submitted in fulfilment of the requirements for the degree of ph. Multilayer piezoelectric stack actuator characterization stewart sherrit, christopher m. Theory and applications of piezo actuators and pzt nanopositioning systems design of pzt stack actuator design of simple lever amplifier data showing impact of active trajectory control on guiding precision. Solidstate actuator, using the inverse piezo electrical effect synonyms. The voltage applied to the stack is distributed to each of the plates within the stack, in a parallel configuration. Piezoelectricity is the electric charge that accumulates in certain solid materials such as crystals, certain ceramics, and biological matter such as bone, dna and various proteins in response to applied mechanical stress. The pe4 actuator provides 4 mm of manual coarse travel via a 0. Piezoelectric actuators are popularly applied as actuators in high precision systems due to their small displacement resolution, fast response and simple construction. Piezo stack actuators are equipped with a highly reliable, multilayer, lowvoltage, piezoelectric transducer stack. Piezoelectric chips and stacks our selection of piezo chips and stacks includes cofired chips, cofired stacks, and discrete stacks. Pdf multilayer piezoelectric stack actuator characterization. Flexure actuators, piezo stacks, tubes, bimorph benders, shear. Fleming school of electrical engineering and computer science, the university of newcastle, australia. The word piezoelectricity means electricity resulting from pressure.
The nominal quasistatic behavior of a piezoelectric stack actuator is a steadystate output displacement that is. Control of an experimental piezoelectric actuators system. Stack actuators can generate linear movement reaching displacements of 250 micrometers and forces up to 10 kn with very high speed. Modeling a stacked piezoelectric actuator in a valve comsol. When a flat piezo contracting actuator is coupled to a substrate, the driving and contraction of the ceramic creates a bending moment, which converts the small transverse change in length into a large bending displacement vertical to the contraction. T hese designs enable the embedding of developed solidstate motors actuators in any structure with the on ly. Design and simulation of a piezoelectric actuated valveless micropump juan j. This thesis presents the design of a piezoelectric ceramic stack actuator for use with needlefree jet injection nfji devices. Displacement modes of piezoelectric actuators in addition to the expansion in the direction of polarization, which is utilized with longitudinal actuators, a contraction always occurs in the piezo actuator that is orthogonal to its polarization when it is operated with an electric field parallel to the direction of polarization. A stack type actuator or piezo actuator from piezosystem jena is based on multilayer ceramics. Micromechatronic is offering the noliac multiaxis shear actuator stacks. This technique has been proven in the field for many years by our extensive experience. The length of the piezoelectric stack is directly controlled by applying an electrical voltage. Acs motion control is an oemfocused supplier of motion controller and drive solutions for hightech systems in fields such as semiconductor manufacturing, laser processing, additive manufacturing, flat panel display manufacturing, electronic assembly, life sciences, and more.
A hybrid actuator consisting of a dc motor plus lead screw in series with a piezoelectric stack. The output voltage range is the first consideration to be taken into account when selecting a drive for piezoelectric actuators. Piezoelectric actuators can also be made with nonmagnetic materials, which allows their use in mri machine. Thinfilm electrodes are applied to the the joining of products, e.
Modeling of piezoelectric stack actuators considering. This sha scheme not only preserves the simplicity of design and fabrication, but also circumvents the sealing problem without losing much ef. The preloaded stack type actuator is designed for dynamical use. Pica piezoelectric linear actuators in stacked design are very reliable and feature a large specific displacement. Conversely, deforming a piezoelectric material produces a voltage. If displacement is prevented, a useable force blocking force will develop. This means that the actuator output displacement depends not only on the input or applied voltage at the present time, but also on the input history 11. Piezoelectric stack actuator life test request pdf. Design figure 1 shows a model of a unit cell actuator and figure 2 shows an sem picture of a threecell series piezoelectric microactuator. Piezo stack actuators and stacked piezo rings make use of the increase of the ceramic thickness in direction. The benchmark solution for piezoelectric actuators is the cofired multilayer actuator cma technology. Depending on the size of the ceramic stacks, these stack type actuators can move masses in the kns.
In the quasistatic limit and assuming zero bond length tb0, the effective density of the piezoelectric stack is, the piezoelectric material density, and the effective elastic constant is the youngs modulus of. Besides, piezoelectric stack actuators used in such systems are affected. For a lot of applications, it is attractive to combine a high voltage. Compared to existing piezoelectric actuator technology, significant features of the feedscrew concept include reversible and robust actuation capability, simple power electronics, and a rigid poweroff selflocking state. Both piezoelectric actuators are actuated such that, when one piezoelectric actuator is extending, the other piezoelectric actuator is contracting then one speak about pushpull or antagonistic system. However, offresonant piezoelectric actuator tends to exhibit important nonlinearities hysteresis. The piezo stack as shock generator if a piezo stack is charged with a very short rise time, the mechanical axial pressure in the ceramic material immediately increases to a high value. Abstract due to their high stiness, small dimensions and low mass, piezoelectric stack actuators are capable of developing. To get rid of the hysteresis, a feedback control configuration is developed to convert the voltage amplifier into a currentcharge contro l amplifier. Optimal design of the large stroke piezoelectric actuator using rhombic mechanism. Techniques and considerations for driving piezoelectric. Single cylindertype piezoelectric actuator with two active. The multilayer piezo actuators are offered as piezo actuator plates and piezo actuator rings single elements or actuator stacks and as high temperature stacks and damage tolerant stacks.
Design and simulation of a piezoelectric actuated valveless. The idea of piezo stack actuators is as simple as it is effective. The system can be made to function under difficult environmental conditions, like. Unified minimalistic modeling of piezoelectric stack actuators for engineering applications. Actuators produce movements like motors do by producing a linear displacement under an electric field, which allows the displacement also to apply a force. Tube actuators are monolithic devices that contract laterally and longitudinally when a voltage is applied between the inner and outer electrodes. They provide submillisecond response and subnanometer resolution. In formulating this model, the authors propose a generalized maxwell resistive capacitor as a lumpedparameter causal. In the cma production process the whole actuator stack structure including internal electrodes and piezo ceramics material is produced in one step.
Response of piezoelectric stack actuators under combined. Controlling helicopter rotor blades using active flaps has been investigated for some time without being put into production. Subnanometer runout introduction advantages of piezoelectric positioning systems applications for piezo actuators glossary units and. Pdf modeling piezoelectric stack actuators for control. May, 2015 by applying a voltage to the stacked piezoelectric actuator, it can be made to expand or contract and the resulting deformation is used to open and close the valve. Nanopositioning piezo stack actuators newport corporation. L driving piezoelectric actuators extraordinarily fast devices that can produce precise motions in subnanometer increments, piezoelectric actuators make unusual demands. This is in contrast to other kinds of moving profiles like shear elements or bending elements bimorphs. This socalled blocking pressure is generated over the full length of the piezo stack and leads to an accelerated expansion of the piezo bar. A solid hydraulically amplified piezoelectric microvalve. A special epoxy sealing guarantees the most flexible, longest lifetime protection available on the market. A nonlinear lumpedparameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for microrobotic applications requiring accurate position andor force control. Dec 23, 2015 these actuators use the transverse piezoelectric effect and typically produce motion in just one direction. Piezoelectric stack pzt stack has been widely used in many fields, such as active vibration.
Piezo products piezoelectric materials apc international. Piezo actuators piezotechnics piezo stack actuators. Popular monolithic stack actuators are available in voltage ratings from 60v to 200v. Piezoelectric actuators developed by cedrat technologies. Multilayer piezoelectric stack actuator characterization. Piezoelectric stack an overview sciencedirect topics. Other options for these actuators can be casings specially designed to manage the heat generated during operation, or include the possibility of position sensing for the piezoelectric stack actuator. Piezo stack actuator,precision piezo actuator, pzt stack actuator,piezo motion, piezo actuation,pzt actuation,piezo mechanics, piezo nanopositioning, piezo ceramic, piezo transducer, shear actuator, piezo bender. Dynamic analytical solution of a piezoelectric stack utilized. Pdf brochure piezo stack actuator specs, drawings, part numbers. However, the hysteresis nonlinear behavior limits the dynamic modeling and. All piezo actuators can be custom designed to match specific requirements.
The p212 and p216 series are highresolution linear piezo actuators translators for static and dynamic applications. Smart actuators, including piezoelectric actuators, shapememoryalloy actuators, and multilayeredtype actuators. Thorlabs discrete piezoelectric stacks consist of multiple piezoelectric chips stacked facetoface and bonded via epoxy and glass beads. Piezoelectric actuators are a new field of research combining electronic and structural. The piezoelectric actuators developed by cedrat technologies have the following outstanding characteristics.
Combining equations 6 and 8, the constant bp1 in the first. Piezoelectric devices applications of piezoelectric actuator. Piezo stacks are also called actuators, piezoelectric actuators or piezoelectric. They are internally preloaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic nanopositioning applications. By using the current control amplifier, the goal is to control the amount of current flowing through the piezoelectric actuator, instead of. Piezoelectric bending actuators function according to the principle of thermostatic bimetals. Piezo stack actuator steminc piezoceramic discs, plates. Piezoline introduction instruction for using piezosystem jena. The focus was to understand the behavior of piezoelectric materials under combined electromechanical loading scenario, and to determine fundamental properties necessary to model the constitutive response and optimize the actuator performance. Piezo stack actuators use the variation of the stack length under. Customer and applicationspecific product developments form the basis for success at pi. It has mainly been applied in support of industrial machinery that requires precise position control. Therefore, analysis of a piezoelectric part requires the solution of a set of coupled partial differential equations with deflections and electrical potential as dependent variables.
Pica power highforce highload packaged preloaded piezo stack linear actuators. Piezoelectric actuator design and application on active. Piezo stack actuator, stack piezo actuator manufacturer. First steps towards piezoaction piezomechanik gmbh. A nonlinear lumpedparameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for. Control of an experimental piezoelectric actuators system materials. Pi is a manufacturer of a range of piezo actuators and transducers, including stack actuators, to flexure guided, motion amplified assemblies. Although the stack design has made the piezo actuator practical, the displacement of the piezo stack is still very limited for some applications 14.
To achive maximum displacement, the drive should be capable of developing the full rated actuator voltage. To this purpose, requirements have to be understood and a. A single stack a and a multilayer b in which the displacement is ampli. Piezoelectric actuator an overview sciencedirect topics. Noliac piezo actuators are made as both monolayer and multilayer products. Design and fabrication of a piezoelectric stack actuator. Pica thru feature an inner hole, for applying a pretension or as clear aperture in optical applications. Piezoelectric stack or multilayer actuators are manufactured by stacking up piezoelectric disks or plates, the axis of the stack being the axis of linear motion that occurs when a voltage is applied. An example of displacement versus applied voltage for a piezo actuator stack in this region of the curve is shown in figure 2. The response of six piezoelectric stack actuators under electrical, mechanical, and combined electromechanical loading was investigated.
When a contracting actuator is mounted to a base or substrate, a bending actuator is created. Hybrid active vibration control of helicopter fuselage. Theory and applications of piezo actuators and pzt. These actuator stacks are available in a wide range of configurations to provide a line of powerful standard solutions dedicated to applications such as nanopositioning, precision mechanics, active vibration cancellation.
Piezo stack actuator,precision piezo actuator, pzt stack actuator, piezo motion, piezo actuation,pzt actuation, piezo mechanics, piezo nanopositioning, piezo ceramic, piezo transducer, shear actuator, piezo. Modeling of piezoelectric stack actuators considering bonding layers article in journal of intelligent material systems and structures 2617 march 2015 with 52 reads how we measure reads. You can also choose from zirconium oxide, aluminazirconia, and silicon nitride piezo actuator there are 682 suppliers who sells piezo actuator on, mainly located in asia. Piezo stack actuators use the variation of the stack length under electrical activation. Chips and discrete stacks with throughholes, shear chips, stacks with attached strain gauges, and bimorph bending actuators are available, as well as piezo ring chips and ring stacks. An appropriate type of actuator can be selected based on the need of force and the displacement requirement of the application. The piezoelectric actuator is a device that features high displacement accuracy, high response speed and high force generation.
The capacitance of the actuator depends on the area and thickness of the ceramic, as well as on its material properties. Literature survey in the control of piezoelectric stack actuator. Cryogenic piezoelectric actuator xiaoning jiang a, william b. Schematic representation of the piezoelectric stack actuator model. In this blog post, we feature a tutorial model of a stacked piezoelectric actuator in a pneumatic valve, new with comsol multiphysics version 5.
Types and applications piezo actuators apc international. They are internally preloaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic applications. Selfheat generation in piezoelectric stack actuators used. Electrical and force characteristics of piezoelectric. Depending on the nature of the piezo material soft vs. Pica piezoelectric stack actuators physik instrumente uk. We can determine the amount of movement that a stack actuator can produce by calculating the amount of voltage applied times the d33, also known as the piezoelectric charge. Pdf unified minimalistic modeling of piezoelectric stack.
Combining two kinematic pairs and applying the brakes, as shown. Resonant frequency and hysteresis of a stack actuator made. Contracting and expanding piezo actuators have small displacementstypically up to 20 micronsbut can generate hundreds of newtons force. A wide variety of piezo actuator options are available to you, such as high frequency ceramics, electrothermal ceramics, and dielectric ceramics. The most commonly used technology is the amplified piezoelectric actuator. Piezo actuator movements will be on the order of a hundred micro meters supporting a load of 7 kncm2. The intrinsic nonlinear and multivalued hysteresis in the piezoelectric actuator has the potential to cause an inaccuracy in, or even instability of, its applied system. Modeling piezoelectric stack actuators for control of. Piezoelectric actuators are transducers that convert electrical energy into a mechanical displacement or. Piezo actuator piezo transducer manufacturer pi usa. Chips and discrete stacks with throughholes, shear chips, stacks with attached strain gauges, and bimorph bending actuators are available, as well as piezo.
Neural network based hysteresis compensation of piezoelectric stack actuator driven active control of helicopter vibration. Compensation of hysteresis on piezoelectric actuators. It takes the form of a thin ceramic disc which is bonded to a metal substrate. Driving piezoelectric actuators apex microtechnology. The focus was to understand the behavior of piezoelectric. While nfji devices have been in use for over 60 years only recently have they been electronically actuated which allows for precise control of jet velocity, penetration depth, and injection volume. For piezo stack actuators, which are assembled with thin, laminar wafers of electroactive ceramic material electrically connected in parallel, the capacitance also depends on the number of layers.
Physics procedia 25 2012 88 a 96 18753892 a 2012 published by elsevier b. Overview npa piezo stack actuators are equipped with a highly reliable, multilayer, lowvoltage, piezoelectric transducer stack. Piezoelectric materials deform under an applied voltage. The piezo stack actuators have been exploited in a number of useful applications including nanopositioning, dynamic scanning system, metrology, aerospace technology and so on. A piezoelectric stack actuator has the advantages of light weight, a large driving force, small driving displacement, a wide working frequency range, and a fast response speed. Piezoelectric stack or multilayer actuators are manufactured by stacking up piezoelectric disks or plates, the. Types and applications a piezoelectric actuator converts an electrical signal into a precisely controlled physical displacement stroke.
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